A SPUTTERING ION SOURCE

被引：53

作者：

HILL, KJ

NELSON, RS

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1965年 / 38卷 / DEC期

关键词：

D O I：

10.1016/0029-554X(65)90095-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：15 / &

共 9 条

[1] ALMEN O, 1962, THESIS GOTHENBURG
[2] AN INTENSE MAGNETRON ION SOURCE FOR HIGH-MELTING POINT MATERIALS
COBIC, B
TOSIC, D
PEROVIC, B
[J]. NUCLEAR INSTRUMENTS & METHODS, 1963, 24 (04): : 358 - 364
[3] DRUAUX J, 1956, ELECTROMAGNETICALLY, pCH4
[4] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES
NELSON, RS
[J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &
[5] NELSON RS, 1965, PHIL MAG, V11, P110
[6] A HIGH TEMPERATURE SPUTTERING ION SOURCE FOR A LABORATORY ISOTOPE SEPARATOR
RAUTENBACH, WL
[J]. NUCLEAR INSTRUMENTS & METHODS, 1960, 9 (02): : 199 - 211
[7] SMITH ML, 1956, ELECTROMAGNETICAL ED, pCH4
[8] STRUMANE R, 1964, INTERACTION RADIA ED
[9] THOMPSON MW, 1964, INTERACTION RADIATIO