DEFECTS AND MICROVOIDS IN A-SI AND A-SI-H

被引：17

作者：

JUNG, AL

WANG, YH

LIU, G

XIONG, JJ

CAO, BS

YU, WZ

ADLER, D

机构：

[1] QUINGHUA UNIV,DEPT PHYS,BEIJING,PEOPLES R CHINA

[2] MIT,CTR MAT SCI & ENGN,CAMBRIDGE,MA 02139

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 74卷 / 01期

关键词：

HYDROGENATED AMORPHOUS SILICON - POSITRON ANNIHILATION SPECTRA;

D O I：

10.1016/0022-3093(85)90396-5

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

(Edited Abstract)

引用

页码：19 / 24

页数：6

共 15 条

[11] PHYSICAL-PROPERTIES OF AMORPHOUS CVD SILICON [J].

HIROSE, M .

JOURNAL DE PHYSIQUE, 1981, 42 (NC4) :705-714

[12] POSITRONFIT EXTENDED - NEW VERSION OF A PROGRAM FOR ANALYZING POSITRON LIFETIME SPECTRA [J].

KIRKEGAARD, P ;

ELDRUP, M .

COMPUTER PHYSICS COMMUNICATIONS, 1974, 7 (07) :401-409

[13] GROWTH-MORPHOLOGY AND DEFECTS IN PLASMA-DEPOSITED A-SI-H FILMS [J].

KNIGHTS, JC .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :159-170

[14] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

LUCOVSKY, G ;

NEMANICH, RJ ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 19 (04) :2064-2073

[15] PROTON-MAGNETIC-RESONANCE STUDIES OF MICROSTRUCTURE IN PLASMA-DEPOSITED AMORPHOUS-SILICON-HYDROGEN FILMS [J].

REIMER, JA ;

VAUGHAN, RW ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1981, 24 (06) :3360-3370

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