FOCUSED ION-BEAM SYSTEM WITH HIGH-CURRENT DENSITY

被引：13

作者：

BISCHOFF, L

HESSE, E

JANSSEN, D

NAEHRING, FK

NOTZOLD, F

SCHMIDT, G

TEICHERT, J

机构：

[1] Central Institute for Nuclear Research Rossendorf, Dresden, 8051

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

E*B Mass Separation Systems - IMSA-100 Focused Ion Beam Systems - Ion Optical Columns - Liquid Metal Ion Sources - Prelens Octupole Deflectors - Shaped Beam Systems;

D O I：

10.1016/0167-9317(91)90113-R

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The project of the IMSA-100 focused ion beam system is presented. The main goal of the system is to achieve an ion current density > 10 A/cm2. The ion-optical column consists of a liquid metal ion source, two electrostatic lenses, a pre-lens octupole deflector, E*B mass separation system, beam blanking plates, and two octupole stigmators. A lithium ion source has been developed.

引用

页码：367 / 370

页数：4