A concept for the design of novel superhard coatings

被引：838

作者：

Veprek, S

Reiprich, S

机构：

[1] Institute for Chemistry of Information Recording, Technical University Munich, D-85747 Garching

来源：

THIN SOLID FILMS | 1995年 / 268卷 / 1-2期

关键词：

hardness; nanostructures; silicon nitride; titanium nitride;

D O I：

10.1016/0040-6090(95)06695-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Based on recent theoretical and experimental results regarding the appearance of supermodulus phenomena in composition-modulated layered heterostructures and on a simple thermodynamic criterion for segregation in ternary nitride systems, a concept for the design of novel nanocrystalline/amorphous composites is suggested. Experimental results on the nc-TiN/a-Si3N4 system are presented to support this concept. A Vickers hardness of 5000 kg mm(-2) and an elastic modulus in excess of 500 GPa combined with a stability against oxidation up to 800 degrees C are reported for such films. Further ternary systems in which similar enhancement of mechanical strength, hardness and elastic modulus is expected, are suggested and briefly discussed with respect to their suitability as protective tribological coatings.

引用

页码：64 / 71

页数：8

共 71 条

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