NANOMETER SPATIAL-RESOLUTION ACHIEVED IN HARD X-RAY-IMAGING AND LAUE DIFFRACTION EXPERIMENTS

被引：191

作者：

BILDERBACK, DH ^{[1
]}

HOFFMAN, SA ^{[1
]}

THIEL, DJ ^{[1
]}

机构：

[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853

来源：

SCIENCE | 1994年 / 263卷 / 5144期

关键词：

D O I：

10.1126/science.8284671

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Tapered glass capillaries have successfully condensed hard x-ray beams to ultrasmall dimensions providing unprecedented spatial resolution for the characterization of materials. A spatial resolution of 50 nanometers was obtained while imaging a lithographically prepared gold pattern with x-rays in the energy range of 5 to 8 kiloelectron volts. This is the highest resolution scanning x-ray image made to date with hard x-rays. With a beam 360 nanometers in diameter, Laue diffraction was observed from the smallest sample volume ever probed by x-ray diffraction, 5 x 10(-3) cubic micrometers.

引用

页码：201 / 203

页数：3

共 19 条

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