THEORETICAL-STUDIES OF DEFECT-INITIATED PARTICLE-EMISSION FROM GAP(110) SURFACES - BASIS FOR A NEW TECHNIQUE OF GENERATING PERFECT SURFACES

被引:24
作者
ITOH, N [1 ]
HATTORI, K [1 ]
NAKAI, Y [1 ]
KANASAKI, J [1 ]
OKANO, A [1 ]
ONG, CK [1 ]
KHOO, GS [1 ]
机构
[1] NATL UNIV SINGAPORE,DEPT PHYS,SINGAPORE 0511,SINGAPORE
关键词
D O I
10.1063/1.106716
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have calculated the energy needed to eject P atoms from several types of defects on the GaP (110) surface as well as from the perfect surface. It is found that most types of defects have a Ga or P atom bonded less strongly than those on the perfect surface. In view of the result of calculation, and of recent experimental observation that less strongly bonded atoms are ejected by irradiation with laser pulses of lower fluences, we suggest a new method of producing perfect surfaces using laser irradiation to eliminate steps and adatoms and deposition to eliminate vacancies.
引用
收藏
页码:3271 / 3273
页数:3
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