A PYROELECTRIC MATRIX SENSOR USING PVDF ON SILICON-CONTAINING FET READOUT CIRCUITRY

被引：5

作者：

HAMMES, PCA ^{[1
]}

REGTIEN, PPL ^{[1
]}

SARRO, PM ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DELFT INST MICROELECTR & SUBMICRON TECHNOL,DEPT ELECT ENGN,2600 GB DELFT,NETHERLANDS

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80049-M

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper the performances of several nine-element infrared matrix sensors using the pyroelectric polymer PVDF are discussed. The improvement of the sensitivity of the sensors, when using a diode instead of an integrated resistor for the biasing of the readout matrix, was experimentally verified. The sensitivity of the sensor covered by a 9 mum PVDF foil increased by a factor of 120 to 6 V/W at 20 Hz. Using a 25 mum foil the sensitivity increased even further to 40 V/W at 20 Hz. The S/N ratio improved by a factor of 30 to 70 dB at 20 Hz for an input infrared power of 1.5 mW. Also, a sensor using JFETs for readout was realized in a BIFET process. The performance of this matrix sensor was similar to that of the MOSFET matrix sensor.

引用

页码：290 / 295

页数：6

共 4 条

[1] A SIMPLE TECHNIQUE TO INTERFACE PYROELECTRIC MATERIALS WITH SILICON SUBSTRATES FOR INFRARED DETECTION
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[2] AN INTEGRATED INFRARED-SENSOR USING THE PYROELECTRIC POLYMER PVDF
HAMMES, PCA
REGTIEN, PPL
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1992, 32 (1-3) : 396 - 402
[3] MUNCH WV, 1991, SENSOR ACTUAT A-PHYS, V25, P167
[4] ON THE GENERATION OF HIGH-FREQUENCY ACOUSTIC ENERGY WITH POLYVINYLIDENE FLUORIDE
SWARTZ, RG
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