学术探索
学术期刊
新闻热点
数据分析
智能评审

ELIMINATION OF SECONDARY AND TERTIARY INTERFEROGRAMS IN FOURIER-TRANSFORM SPECTROSCOPY OF SEMICONDUCTOR WAFERS

被引：7
作者：
GRIFFITHS, PR
机构：
来源：
APPLIED SPECTROSCOPY | 1982年 / 36卷 / 03期
关键词：
D O I：
10.1366/0003702824638575
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：319 / 319
页数：1
相关论文
共 5 条
[1]   ERRORS IN ABSORBANCE MEASUREMENTS IN INFRARED FOURIER-TRANSFORM SPECTROMETRY BECAUSE OF LIMITED INSTRUMENT RESOLUTION [J].
ANDERSON, RJ ;
GRIFFITHS, PR .
ANALYTICAL CHEMISTRY, 1975, 47 (14) :2339-2347
[2]   TERTIARY INTERFEROGRAMS IN FOURIER-TRANSFORM SPECTROSCOPY [J].
BAGHDADI, A ;
FORMAN, RA .
APPLIED SPECTROSCOPY, 1981, 35 (05) :473-475
[3]   ELIMINATION OF INTERFERENCE-FRINGES FROM INFRARED-SPECTRA [J].
CLARK, FRS ;
MOFFATT, DJ .
APPLIED SPECTROSCOPY, 1978, 32 (06) :547-549
[4]   NEW TRENDS IN APPLICATION OF FOURIER-TRANSFORM INFRARED SPECTROSCOPY TO ANALYTICAL-CHEMISTRY [J].
HIRSCHFELD, T .
APPLIED OPTICS, 1978, 17 (09) :1400-1412
[5]   ELIMINATION OF THIN-FILM INFRARED CHANNEL SPECTRA IN FOURIER-TRANSFORM INFRARED SPECTROSCOPY [J].
HIRSCHFELD, T ;
MANTZ, AW .
APPLIED SPECTROSCOPY, 1976, 30 (05) :552-553
1