DIFFUSION OF PHOSPHORUS IN TASI2 THIN-FILMS .2. LATTICE AND SHORT-CIRCUIT DIFFUSION IN TASI2/SIO2

被引：4

作者：

PELLEG, J

机构：

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 02期

关键词：

D O I：

10.1016/0040-6090(83)90217-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：129 / 138

页数：10

共 21 条

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