VARIATIONS IN THE COLOR OF GROUP-IV B-NITRIDE FILMS

被引：68

作者：

PERRY, AJ

SCHOENES, J

机构：

[1] BALZERS AG,FL-9496 BALZERS,LIECHTENSTEIN

[2] SWISS FED INST TECHNOL,FESTKORPERPHYS LAB,CH-8093 ZURICH,SWITZERLAND

来源：

VACUUM | 1986年 / 36卷 / 1-3期

关键词：

D O I：

10.1016/0042-207X(86)90290-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：149 / 155

页数：7

共 50 条

[1]

AOKI I, 1984, APR INT C MET COAT S

[2] ARRANGEMENT OF OPTICAL MEASUREMENT VALUES FOR ELECTRONIC BAND-STRUCTURE IN MIXED-CRYSTAL SERIES TI(C,N) [J].

BOHM, G ;

GORETZKI, H .

JOURNAL OF THE LESS-COMMON METALS, 1972, 27 (03) :311-&

[3]

Brager A, 1939, ACTA PHYSICOCHIM URS, V11, P617

[4] THE STRESS IN ION-PLATED HFN AND TIN COATINGS [J].

CHOLLET, L ;

PERRY, AJ .

THIN SOLID FILMS, 1985, 123 (03) :223-234

[5] PSEUDOTERNARY SYSTEM ZRO-ZRN-ZRC [J].

CONSTANT, K ;

KIEFFER, R ;

ETTMAYER, P .

MONATSHEFTE FUR CHEMIE, 1975, 106 (04) :823-832

[6] ABOUT PSEUDOTERNARY SYSTEM HFO-HFN-HFC [J].

CONSTANT, K ;

KIEFFER, R ;

ETTMAYER, P .

MONATSHEFTE FUR CHEMIE, 1975, 106 (04) :973-981

[7] BURIED SPUTTERED ZIRCONIUM LAYER TRIBOLOGICAL COATINGS [J].

DUCKWORTH, RG .

THIN SOLID FILMS, 1981, 84 (03) :307-314

[8]

Ehrlich P., 1949, Z ANORG CHEM, V259, P1, DOI [10.1002/zaac.19492590102, DOI 10.1002/ZAAC.19492590102]

[9] MORPHOLOGY AND STRUCTURE OF ION-PLATED TIN, TIC AND TI(C,N) COATINGS [J].

GABRIEL, HM ;

KLOOS, KH .

THIN SOLID FILMS, 1984, 118 (03) :243-254

[10]

German R.M., 1980, GOLD BULL, P113

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