CALIBRATION OF AN ENERGY DISPERSIVE SPECTROSCOPY K-FACTOR USING RUTHERFORD BACKSCATTERING

被引:10
作者
BARBOUR, JC
SICKAFUS, K
NASTASI, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期
关键词
D O I
10.1116/1.572941
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1895 / 1902
页数:8
相关论文
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