IDENTIFICATION OF CARBON AND TANTALUM CHEMICAL-STATES IN METAL-DOPED A-C-H FILMS

被引：21

作者：

BENNDORF, C

GRISCHKE, M

KOEBERLE, H

MEMMING, R

BRAUER, A

THIEME, F

机构：

来源：

关键词：

D O I：

10.1016/0257-8972(88)90147-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：171 / 181

页数：11

共 10 条

[1] VARIATION OF LATTICE PARAMETER WITH CARBON CONTENT OF TANTALUM CARBIDE
BOWMAN, AL
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1961, 65 (09) : 1596 - &
[2] BURSELL MC, 1986, J VAC SCI TECHNOL A, V4, P2459
[3] COS A, 1986, J APPL PHYS, V60, P3323
[4] DIMIGEN H, 1987, APPL PHYS LETT, V50
[5] Dischler B., 1987, AMORPHOUS HYDROGENAT, P189
[6] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS
ENKE, K
DIMIGEN, H
HUBSCH, H
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (04) : 291 - 292
[7] GRISCHKE M, 1987, AMORPHOUS HYDROGENAT, V17, P491
[8] KOEBERLE HK, 1987, AMORPHOUS HYDROGENAT, V17, P485
[9] RAMQUIST L, 1970, J PHYS CHEM SOLIDS, V31, P2699
[10] SCALING THEORY OF PERCOLATION CLUSTERS
STAUFFER, D
[J]. PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS, 1979, 54 (01): : 1 - 74