324X487 SCHOTTKY-BARRIER INFRARED IMAGER

被引：5

作者：

KONUMA, K

TERANISHI, N

TOHYAMA, S

MASUBUCHI, K

YAMAGATA, S

TANAKA, T

ODA, E

MORIYAMA, Y

TAKADA, N

YOSHIOKA, N

机构：

[1] ARIZONA MED CTR,CTR SOLID STATE ELECTR,TUCSON,AZ 85724

[2] NEC CORP LTD,DEPT GUIDANCE ENGN,SAGAMIHARA,KANAGAWA 229,JAPAN

[3] NEC CORP LTD,DIV HYBRID INTEGRATED CIRCUITS,SAGAMIHARA,KANAGAWA 229,JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1990年 / 37卷 / 03期

关键词：

D O I：

10.1109/16.47766

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Standard TV-compatible PtSi Schottky-barrier infrared imager design and performance are described. The imager is a 324 x 487 element area array and has an electronic shutter function. Although the pixel is 42 x 21 μm, in size, a large fill factor of 42 percent is obtained, using a 1.5-μm, minimum design rule and a two-level poly-silicon layer and two-level aluminum layer structure. Using face-down bonding technology, the authors successfully decreased the package size to 60 percent, compared with conventional ceramic package size. Due to optimizing the Schottky-barrier diode process and the diode structure, the noise equivalent temperature difference (NETD) is as small as 0.1 K at f/l. © 1990 IEEE

引用

页码：629 / 635

页数：7

共 7 条

[1]

ELABD H, 1982, RCA REV, V43, P569

[2]

ELABD H, 1982, IEEE T ELECTRON DEV, V3, P89

[3]

KIMATA M, 1987, P IEEE INT SOLID STA, P110

[4] 160X244 ELEMENT PTSI SCHOTTKY-BARRIER IR-CCD IMAGE SENSOR [J].

KOSONOCKY, WF ;

SHALLCROSS, FV ;

VILLANI, TS ;

GROPPE, JV .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (08) :1564-1573

[5] A CONTROLLABLE PIECEWISE LINEAR-OUTPUT CIRCUIT FOR CCD MULTIPLEXERS [J].

STETSON, SB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (08) :1538-1540

[6]

YUTANI N, 1987, IEDM TECH DIG, P124

[7]

[No title captured]

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