ION-IMPLANTATION DISTRIBUTIONS IN INHOMOGENEOUS MATERIALS

被引：20

作者：

BRICE, DK

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 17卷 / 04期

关键词：

D O I：

10.1016/0168-583X(86)90114-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：289 / 299

页数：11

共 20 条

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[6] BACKSCATTERING MEASUREMENTS OF IMPLANTED ION DISTRIBUTIONS IN DOUBLE-LAYER STRUCTURES [J].

ISHIWARA, H ;

MACKINTOSH, WD .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) :4729-4734

[7] DEPTH DISTRIBUTION PROFILING OF DEUTERIUM AND HE-3 [J].

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[8]

LANGLEY RA, 1982, J NUCL MATER, V111

[9]

LECUYER J, 1977, J VAC SCI TECHNOL, V14, P492

[10]

LINDHARD J, 1963, K DAN VIDENSK SELSK, V33

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