USE OF SAHA-EGGERT EQUATION FOR QUANTITATIVE SIMS ANALYSIS USING ARGON PRIMARY IONS

被引:44
作者
RUDENAUER, FG
STEIGER, W
WERNER, HW
机构
[1] OSTERREICH STUDIEN GESELL ATOMENERGIE,LENAUGASSE 10,A-1082 VIENNA,AUSTRIA
[2] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS
关键词
D O I
10.1016/0039-6028(76)90204-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:553 / 560
页数:8
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