LASER SPUTTERING .3. THE MECHANISM OF THE SPUTTERING OF METALS LOW-ENERGY DENSITIES

被引：181

作者：

KELLY, R

ROTHENBERG, JE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90464-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 [仪器科学与技术]; 080401 [精密仪器及机械]; 081102 [检测技术与自动化装置];

摘要：

引用

页码：755 / 763

页数：9

共 47 条

[1]

DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].

ASPNES, DE ;

STUDNA, AA .

PHYSICAL REVIEW B, 1983, 27 (02) :985-1009

[2]

OPTICAL CONSTANTS OF INCANDESCENT REFRACTORY METALS [J].

BARNES, BT .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (11) :1546-&

[3]

BATANOV VA, 1973, JETP LETT+, V17, P247

[4]

EFFECT OF ELECTRON-HOLE PAIRS ON THE MELTING OF SILICON [J].

BOK, J .

PHYSICS LETTERS A, 1981, 84 (08) :448-450

[5]

Carslaw HS, 1959, CONDUCTION HEAT SOLI, P259

[6]

THE INFLUENCE OF NON-LINEAR THERMAL-DIFFUSION ON ENERGY SPIKE DEVELOPMENT AND QUENCHING [J].

CARTER, G .

RADIATION EFFECTS LETTERS, 1980, 50 (3-6) :147-151

[7]

JANAF THERMOCHEMICAL TABLES, 1982 SUPPLEMENT [J].

CHASE, MW ;

CURNUTT, JL ;

DOWNEY, JR ;

MCDONALD, RA ;

SYVERUD, AN ;

VALENZUELA, EA .

JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1982, 11 (03) :695-940

[8]

Crawley A. F., 1974, International Metallurgical Reviews, V19, P32, DOI 10.1179/095066074790137015

[9]

HIGH-INTENSITY LASER-INDUCED VAPORIZATION AND EXPLOSION OF SOLID MATERIAL [J].

DABBY, FW ;

PAEK, U .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1972, QE 8 (02) :106-&

[10]

Figueira J. F., 1983, Surface Studies with Lasers. Proceedings of the International Conference, P212

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