ION-ASSISTED CVD OF GRADED DIAMOND-LIKE CARBON (DLC) BASED COATINGS

Graded DLC based coatings and multilayers for wear resistance applications have been produced using a novel hybrid unbalanced magnetron sputtering/ low pressure CVD system. The main features of this highly flexible and scalable process are discussed. These films have been characterised using a variety of techniques including SEM, microhardness, adhesion, wear rate and lifetime tests. For example: microhardness of > 4000 Hv; excellent adhesion, Lc 115-125 N; coefficient of friction during prolonged running against WC of 0.15; volumetric wear rates 1/5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.