共 15 条
[3]
Dubiel D., 1989, Praktische Metallographie, V26, P68
[4]
ERIKSSON S, 1934, JKA-JERNKONTORET ANN, V118, P530
[6]
THE INFLUENCE OF MICROSTRUCTURE ON STRESS STATE OF SPUTTER DEPOSITED CHROMIUM NITRIDE FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (05)
:3819-3826
[7]
STRESS STATE OF CHROMIUM NITRIDE FILMS DEPOSITED BY REACTIVE DIRECT-CURRENT PLANAR MAGNETRON SPUTTERING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (05)
:3809-3818
[8]
HOFFMANN D, 1991, MAT SCI ENG A-STRUCT, V139, P290
[9]
HOHENKER M, 1987, BYTE MAG, V12
[10]
PINSKER ZG, 1958, SOV PHYS-CRYSTALLOGR, V3, P285