STRUCTURAL AND ELECTRICAL-PROPERTIES OF BATIO3 THIN-FILMS ON SI(100) SUBSTRATE BY HYDROTHERMAL SYNTHESIS

被引：26

作者：

CHO, CR ^{[1
]}

SHI, EW ^{[1
]}

JANG, MS ^{[1
]}

JEONG, SY ^{[1
]}

KIM, SC ^{[1
]}

机构：

[1] DONGEUI UNIV,DEPT PHYS,PUSAN 614714,SOUTH KOREA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 9A期

关键词：

BARIUM TITANATE; THIN FILM; SILICON SUBSTRATE; DIELECTRIC CONSTANTS; HYDROTHERMAL METHOD;

D O I：

10.1143/JJAP.33.4984

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Crack-free, dense, polycrystalline BaTiO3 thin films have been synthesized on the Ti-deposited Si(100) substrates with various alkaline solutions of barium salts in the temperature range from 150 degrees C to 280 degrees C by hydrothermal method. The fabricated BaTiO3 thin films were found to have good adhesion on the substrate. The structural properties of thin films were investigated by X-ray diffraction (XRD) measurements. It was discussed about the crystallinity, surface morphology and interfaces of the resultant films depending on the reaction conditions such as time, temperature and solution. The thickness of the films increased with increasing temperature and time of reaction. The dielectric constants and the loss factor of thin film were measured in the frequency range from 100 Hz to 1 MHz at room temperature.

引用

页码：4984 / 4990

页数：7

共 11 条

[1] ELECTROCHEMICAL, HYDROTHERMAL, AND ELECTROCHEMICAL-HYDROTHERMAL SYNTHESIS OF BARIUM-TITANATE THIN-FILMS ON TITANIUM SUBSTRATES [J].