EFFICIENT LOW PRESSURE SPUTTERING IN A LARGE INVERTED MAGNETRON SUITABLE FOR FILM SYNTHESIS

被引：68

作者：

GILL, WD

KAY, E

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1965年 / 36卷 / 03期

关键词：

D O I：

10.1063/1.1719553

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：277 / &

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共 7 条

[1] SPUTTERING OF SILVER BY LIGHT IONS WITH ENERGIES FROM 2 TO 12 KEV [J].

GRONLUND, F ;

MOORE, WJ .

JOURNAL OF CHEMICAL PHYSICS, 1960, 32 (05) :1540-1545

[2]

Helmer J. C., 1961, P IRE, V49, P1920

[3] The effect of a uniform magnetic field on the motion of electrons between coaxial cylinders. [J].

Hull, AW .

PHYSICAL REVIEW, 1921, 18 (01) :31-57

[4] MAGNETICALLY CONFINED COLD-CATHODE GAS DISCHARGES AT LOW PRESSURES [J].

JEPSEN, RL .

JOURNAL OF APPLIED PHYSICS, 1961, 32 (12) :2619-&

[5] MAGNETIC FIELD EFFECTS ON AN ABNORMAL TRNCATED GLOW DISCHARGE AND THEIR RELATION TO SPUTTERED THIN-FILM GROWTH [J].

KAY, E .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (04) :760-&

[6] THE TOWNSEND DISCHARGE IN A COAXIAL DIODE WITH AXIAL MAGNETIC FIELD [J].

REDHEAD, PA .

CANADIAN JOURNAL OF PHYSICS, 1958, 36 (03) :255-270

[7]

WEHNER GK, 1962, 2309 GEN MILLS REPT