ANODIZATION AND BREAKDOWN MODEL OF TA2O5 FILMS

被引：37

作者：

ALBELLA, JM ^{[1
]}

MONTERO, I ^{[1
]}

MARTINEZDUART, JM ^{[1
]}

机构：

[1] UNIV AUTONOMA CANTOBLANCO MADRID,DEPT FIS APLICADA,E-28049 MADRID,SPAIN

来源：

THIN SOLID FILMS | 1985年 / 125卷 / 1-2期

关键词：

ELECTROLYTES;

D O I：

10.1016/0040-6090(85)90395-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new model for the anodization and breakdown characteristics of Ta//2O//5 films is presented. In addition to the ionic oxidation current, the model takes into account both the ionic current consumed by the electrolyte species incorporated into the oxide and the avalanche electronic current. Experimental results on anodization curves, the breakdown voltage and other anodization parameters are presented and compared with the values predicted by the model.

引用

页码：57 / 62

页数：6

共 10 条

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MONTERO, I
ALBELLA, JM
MARTINEZDUART, JM
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