LATERAL GROWTH-RATES IN LASER CVD OF MICROSTRUCTURES

被引：32

作者：

PETZOLDT, F ^{[1
]}

PIGLMAYER, K ^{[1
]}

KRAUTER, W ^{[1
]}

BAUERLE, D ^{[1
]}

机构：

[1] JOHANNES KEPLER UNIV,A-4040 LINZ,AUSTRIA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 35卷 / 03期

关键词：

D O I：

10.1007/BF00616969

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：155 / 159

页数：5

共 11 条

[1] BAUERLE D, 1983, MATER RES SOC S P, V17, P19
[2] BAUERLE D, 1983, SPRINGER SERIES CHEM, V33, P178
[3] CARLTON HE, 1967, AM I CHEM ENG J, V12, P86
[4] CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P216
[5] HETEROGENEOUS AND HOMOGENEOUS THERMAL DECOMPOSITIONS OF NICKEL CARBONYL
CHAN, RK
MCINTOSH, R
[J]. CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1962, 40 (05): : 845 - &
[6] Davies A. J, 1980, FINITE ELEMENT METHO
[7] GOOSEN AJ, 1972, AFRICAN CHEM I, V25, P370
[8] SPECTRAL SELECTIVITY OF NICKEL AND CHROMIUM ROUGH SURFACES
KIVAISI, RT
STENSLAND, L
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04): : 233 - 238
[9] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF NI BY DECOMPOSITION OF NI(CO)4
KRAUTER, W
BAUERLE, D
FIMBERGER, F
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01): : 13 - 18
[10] PIGLMAYER K, 1984, MATER RES SOC S P