ON A HIGH-PURITY GE EDS DETECTOR .3. THE RELIABLE ACQUISITION OF EDS SPECTRA

被引:1
作者
FOITZIK, AH
XIAO, SQ
HEUER, AH
WUNDERLICH, W
机构
[1] CASE WESTERN RESERVE UNIV,DEPT MAT SCI & ENGN,CLEVELAND,OH 44106
[2] MAX PLANCK INST IRON RES,W-4000 DUSSELDORF,GERMANY
关键词
D O I
10.1016/0304-3991(93)90013-N
中图分类号
TH742 [显微镜];
学科分类号
摘要
The factors concerning reliable acquisition of EDS spectra to be used for light-element analysis, particularly condenser aperture size, absorption effects, and mass loss during specimen preparation or data acquisition, are discussed. Absorption effects are the most serious for quantitative analysis, and indicate the need for TEM foil thicknesses comparable to those needed for HREM or EELS analysis.
引用
收藏
页码:229 / 235
页数:7
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