REACTIONS BETWEEN METAL ATOMS AND GASES DURING PRODUCTION OF THIN-FILMS IN HIGH-VACUUM

被引：4

作者：

AUWARTER, M ^{[1
]}

机构：

[1] BALZERS AG HOCHVAKUUMTECH & DUNNE SCHICHTEN,FL-9496 BALZERS,SWITZERLAND

来源：

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH | 1975年 / 14卷 / 04期

关键词：

D O I：

10.1002/anie.197502071

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：207 / 211

页数：5

共 16 条

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[5] On the structure of thin, condensed metal layers at low temperatures
Hass, G
[J]. NATURWISSENSCHAFTEN, 1937, 25 : 232 - 233
[6] REACTIVE EVAPORATION IN IONIZED GASES
HEITMANN, W
[J]. APPLIED OPTICS, 1971, 10 (11): : 2414 - &
[7] HUBER WK, 1972, VERH DEUT PHYS GES, V5, P470
[8] KERNER K, 1970, BOSCH TECH BER, V3, P3
[9] CORRELATION BETWEEN FILM STRUCTURE AND SORPTION BEHAVIOR OF VAPOR-DEPOSITED ZNS, CRYOLITE AND MGF2 FILMS
PULKER, HK
JUNG, E
[J]. THIN SOLID FILMS, 1972, 9 (01) : 57 - &
[10] PULKER HK, 1973, OCT M OEST PHYS GES