INFLUENCE EXERTED BY THE PLASMA EDGE POTENTIAL ON RECYCLING, SPUTTERING AND IMPURITY ACCUMULATION

被引：31

作者：

OREN, L

KELLER, L

SCHWIRZKE, F

TALMADGE, S

TAYLOR, RJ

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1982年 / 111卷 / NOV-期

关键词：

D O I：

10.1016/0022-3115(82)90177-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：34 / 38

页数：5

共 7 条

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