AFM AND STM ACTIVITIES AT ADVANCED TECHNOLOGIES CENTER

被引:8
作者
MOISEEV, YN
PANOV, VI
SAVINOV, SV
VASILEV, SI
YAMINSKY, IV
机构
[1] Advanced Technologies Center, Moscow University
关键词
D O I
10.1016/0304-3991(92)90490-B
中图分类号
TH742 [显微镜];
学科分类号
摘要
A scanning tunneling microscope combined with an atomic force microscope as an option for surface studies in air at room temperature is described. The device characteristics (AFM and STM) are: normal resolution less-than-or-equal-to 0.01 nm, thermal drift less-than-or-equal-to 1 nm/h, overall measurement time per one pixel greater-than-or-equal-to 0.3 ms. The application of graphite structures for subnanometer metrology is discussed. A friction mode is implemented in the AEM for contrasting atomically resolved images. Different materials (quartz substrates, diamond-like thin films, Langmuir-Blodgett films) with unique atomic flatness appropriate for nanotechnological purposes are investigated.
引用
收藏
页码:1596 / 1601
页数:6
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