LASER-RECRYSTALLIZED POLYCRYSTALLINE-SILICON THIN-FILM TRANSISTORS WITH LOW LEAKAGE CURRENT AND HIGH SWITCHING RATIO

被引:20
作者
SEKI, S
KOGURE, O
TSUJIYAMA, B
机构
关键词
D O I
10.1109/EDL.1987.26681
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:425 / 427
页数:3
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[1]   POLYCRYSTALLINE-SILICON DEVICE TECHNOLOGY FOR LARGE-AREA ELECTRONICS [J].
HAWKINS, WG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) :477-481
[3]   CHARACTERISTICS AND 3-DIMENSIONAL INTEGRATION OF MOSFETS IN SMALL-GRAIN LPCVD POLYCRYSTALLINE SILICON [J].
MALHI, SDS ;
SHICHIJO, H ;
BANERJEE, SK ;
SUNDARESAN, R ;
ELAHY, M ;
POLLACK, GP ;
RICHARDSON, WF ;
SHAH, AH ;
HITE, LR ;
WOMACK, RH ;
CHATTERJEE, PK ;
LAM, HW .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (02) :258-281
[4]   DESIGN AND CHARACTERISTICS OF THE LIGHTLY DOPED DRAIN-SOURCE (LDD) INSULATED GATE FIELD-EFFECT TRANSISTOR [J].
OGURA, S ;
TSANG, PJ ;
WALKER, WW ;
CRITCHLOW, DL ;
SHEPARD, JF .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) :1359-1367
[5]   HYDROGEN PASSIVATION OF POLYSILICON MOSFETS FROM A PLASMA NITRIDE SOURCE [J].
POLLACK, GP ;
RICHARDSON, WF ;
MALHI, SDS ;
BONIFIELD, T ;
SHICHIJO, H ;
BANERJEE, S ;
ELAHY, M ;
SHAH, AH ;
WOMACK, R ;
CHATTERJEE, PK .
IEEE ELECTRON DEVICE LETTERS, 1984, 5 (11) :468-470
[6]   EFFECTS OF CRYSTALLIZATION ON TRAP STATE DENSITIES AT GRAIN-BOUNDARIES IN POLYCRYSTALLINE SILICON [J].
SEKI, S ;
KOGURE, O ;
TSUJIYAMA, B .
IEEE ELECTRON DEVICE LETTERS, 1987, 8 (08) :368-370