A STUDY OF THE GAS-FLOW IN THE RF LOW-PRESSURE SUPERSONIC JET PLASMA CHEMICAL-SYSTEM

被引:23
作者
TICHY, M
SICHA, M
BARDOS, L
SOUKUP, L
JASTRABIK, L
KAPOUN, K
TOUS, J
MAZANEC, Z
SOUKUP, RJ
机构
[1] ACAD SCI CZECH REPUBL,INST PHYS,OPT SECT,CR-18040 PRAGUE 8,CZECH REPUBLIC
[2] S BOHEMIAN UNIV,COLL EDUC,DEPT PHYS,CESKE BUDEJOVICE,CZECH REPUBLIC
[3] UNIV NEBRASKA,DEPT ELECT ENGN,LINCOLN,NE 68588
关键词
D O I
10.1002/ctpp.2150340607
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We present results of the experimental study of the gas now in the RF low-pressure supersonic-jet plasma-chemical reactor. The flow is investigated by using photography with subsequent digital picture processing. The results of the investigations yield valuable data for the physical model of the plasma-jet system.
引用
收藏
页码:765 / 772
页数:8
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