POTENTIOMETRIC SILICON MICROSENSOR FOR NITRATE AND AMMONIUM

被引：31

作者：

KNOLL, M ^{[1
]}

CAMMANN, K ^{[1
]}

DUMSCHAT, C ^{[1
]}

SUNDERMEIER, C ^{[1
]}

ESHOLD, J ^{[1
]}

机构：

[1] INST CHEMO & BIOSENSOR,MENDELSTR 11,D-48149 MUNSTER,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 18卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(94)87055-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new method of the integration of ion-sensitive membrane and silicon sensor chip has been developed. The ion-sensitive membrane is deposited into pyramidal containments produced on silicon by an anisotropic etching technique. Here we demonstrate the application of this method to the development of nitrate-sensitive sensors and ammonium-sensitive sensors. Acrylate and silicon matrix membranes were casted into the membrane containment. The sensors showed comparable response characteristics like sensors with PVC matrix membranes but had a considerably improved yield of sensor preparation.

引用

页码：51 / 55

页数：5