Characterization of PZT thin films for micromotors

被引：34

作者：

Muralt, P

Kholkin, A

Kohli, M

Maeder, T

Setter, N

机构：

[1] Laboratoire de Céramique, Ecole Politechnique Féderale, MX-D Ecublens

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00116-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Piezoelectric membranes consisting of sputter deposited PbZrXTi1-XO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and de-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d(31)approximate to 40 pm/V). The latter was also derived from the quasi-static deflections.

引用

页码：67 / 70

页数：4

共 12 条

[1]

Flynn A. M., 1992, Journal of Microelectromechanical Systems, V1, P44, DOI 10.1109/84.128055

[2]

KHOLKIN A, 1995, MICROELECTRON ENG, V29

[3]

KUROSAWA M, 1992, IEEE ULTRASONICS S, V92, P893

[4] MEASUREMENT OF PIEZOELECTRIC COEFFICIENTS OF FERROELECTRIC THIN-FILMS [J].