OPTIMIZATION OF THE IN SITU PROCESS FOR YBA2CU3OX FILMS PREPARED BY LASER ABLATION

被引：3

作者：

SCHILLING, M

LAUE, KD

MERKT, U

机构：

[1] Institut für Angewandte Physik, Universität Hamburg, 2000 Hamburg 36

来源：

JOURNAL OF THE LESS-COMMON METALS | 1990年 / 164卷

关键词：

D O I：

10.1016/0022-5088(90)90239-G

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

For the preparation of thin films of YBa2Cu3Ox a KrF excimer laser with 248 nm wavelength and 20 ns pulse duration is used. Optimization of the energy density of the laser beam focused on the target, the substrate temperature, the oxygen pressure during film growth ana the cooling procedure is crucial to obtain good superconducting films on SrTiO3, Al2O3 and Si substrates. Conditions of the film growth and the cooling to room temperature after deposition were optimized employing in situ resistance measurements. With this method it was also possible to investigate the reversible oxygen diffusion into and out of the films. © 1990.

引用

页码：400 / 406

页数：7

共 12 条

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