FABRICATION OF YBACUO-JOSEPHSON-JUNCTIONS ON MGO-SUBSTRATES DAMAGED BY A FOCUSED ION-BEAM PRIOR TO FILM DEPOSITION

被引：14

作者：

NEUMANN, C

SUZUKI, K

ENOMOTO, Y

TANAKA, S

机构：

[1] Superconductivity Research Laboratory, International Superconductivity Technology Center, Tokyo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1993年 / 32卷 / 5B期

关键词：

FOCUSED ION BEAM; APPLICATIONS OF OXIDE SUPERCONDUCTORS; JOSEPHSON-JUNCTIONS; TRANSPORT PROPERTIES;

D O I：

10.1143/JJAP.32.L727

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

By using a focused Ga-ion-beam we have damaged micro-areas of MgO-substrates through a protective gold-layer. Two different types of damage are produced: the flat type is to damage the surface by the implantation of Ga-ions whereas the groove type is simply geometrical damage to the substrates by sputtering the MgO. A YBa2Cu3O7-x (YBaCuO)-film was deposited on the as prepared substrates and the final junction was then defined by photolithography and Ar-milling over the damaged region. Under microwave irradiation Shapiro-steps were observed on these junctions, and a R(n) x I(c) of up to 3 mV at 4.2 K was achieved f or the flat type junctions.

引用

页码：L727 / L729

页数：3

共 14 条

[1]

ADACHI T, 1991, 1991 P SEM TECHN SEM

[2] ALL A-AXIS ORIENTED YBA2CU3O7-Y-PRBA2CU3O7-Z-YBA2CU3O7-Y JOSEPHSON DEVICES OPERATING AT 80-K [J].