THERMAL OUTGASSING FROM ALUMINUM-ALLOY VACUUM CHAMBERS

被引：22

作者：

CHEN, JR ^{[1
]}

NARUSHIMA, K ^{[1
]}

ISHIMARU, H ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.573276

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2188 / 2191

页数：4

共 9 条

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