Laser exposure of Parylene-C insulated microelectrodes

被引：49

作者：

Schmidt, EM ^{[1
]}

Bak, MJ ^{[1
]}

Christensen, P ^{[1
]}

机构：

[1] POTOMAC PHOTON INC,LANHAM,MD 20706

来源：

JOURNAL OF NEUROSCIENCE METHODS | 1995年 / 62卷 / 1-2期

关键词：

Photoablation; Silane; Laser microscope; UV laser; micromachining;

D O I：

10.1016/0165-0270(95)00060-7

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

The polymer, Parylene-C, has proven to be a biocompatible insulation for microelectrodes. However, due to its inert nature,the removal of the insulation from the tips of microelectrodes is difficult. This paper describes the use of an ultraviolet laser system to micromachine Parylene-C insulation with photoablation to precisely expose an arbitrary shape recording or stimulating surface.

引用

页码：89 / 92

页数：4

共 5 条

[1] PARYLENE AS A CHRONICALLY STABLE, REPRODUCIBLE MICROELECTRODE INSULATOR [J].