SPUTTERED NDFEB-FILMS OF HIGH COERCIVITY

被引:21
作者
HOMBURG, H [1 ]
SINNEMANN, T [1 ]
METHFESSEL, S [1 ]
ROSENBERG, M [1 ]
GU, BX [1 ]
机构
[1] NANJING UNIV,DEPT PHYS,NANJING,PEOPLES R CHINA
关键词
D O I
10.1016/0304-8853(90)90497-E
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin Nd(Dy)FeB-films prepared by rf-magnetron sputtering with different substrate temperatures and deposition rates were investigated for their magnetic and structural properties. © 1990.
引用
收藏
页码:231 / 233
页数:3
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