COMPARISON BETWEEN ATMOSPHERIC AND REDUCED PRESSURE GAAS MOCVD

被引：14

作者：

KOBAYASHI, N

FUKUI, T

HORIKOSHI, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 11期

关键词：

D O I：

10.1143/JJAP.21.L705

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：L705 / L706

页数：2

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