IR, ESCA and Auger analysis of thermally hydrogenated a-Si:H thin films

被引：4

作者：

Essa, IM

Essa, AA

Makadsi, MN

机构：

[1] Department of Physics, College of Science, University of Baghdad, Jaderiya

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1995年 / 39卷 / 01期

关键词：

D O I：

10.1016/0927-0248(95)00035-6

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Hydrogenated amorphous silicon thin films have been prepared by thermal evaporation. IR investigations showed the existence of all expected Si-H. The electron spectroscopy for chemical analysis exhibited the existence of oxygen and carbon atoms on the silicon surface which led to a shift in the Si2p core level. Auger spectroscopy also exhibited a peak shift in the kinetic energy. Both shifts are interpreted on the bases of the environmental change in the amorphous structure.

引用

页码：19 / 25

页数：7

共 17 条

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