IONIZATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT

被引：48

作者：

KRISHNAKUMAR, E ^{[1
]}

SRIVASTAVA, SK ^{[1
]}

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

来源：

CONTRIBUTIONS TO PLASMA PHYSICS | 1995年 / 35卷 / 4-5期

关键词：

D O I：

10.1002/ctpp.2150350407

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Partial ionization cross sections for silane and disilane by electron impact have been measured for electron energies in the range of threshold to 1000 eV using a crossed beam geometry and employing a pulsed electron beam and a pulsed ion extraction technique. The cross sections were normalized by using the relative flow technique. For ease of use in various plasma modeling we have fitted the cross sections to an empirical formula.

引用

页码：395 / 404

页数：10

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