SOFT-MAGNETIC PROPERTIES OF CO-BASED HETEROGENEOUS AMORPHOUS-ALLOYS WITH HIGH ELECTRICAL-RESISTIVITY

被引：9

作者：

OHNUMA, S ^{[1
]}

FUJIMORI, H ^{[1
]}

FURUKAWA, S ^{[1
]}

MATSUMOTO, F ^{[1
]}

MASUMOTO, T ^{[1
]}

机构：

[1] TOHOKU UNIV, INST MAT RES, SENDAI, MIYAGI 980, JAPAN

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1994年 / 181卷

关键词：

D O I：

10.1016/0921-5093(94)90764-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The structure and properties of Co95Fe5-Me-N films (M = Al, B or Si), prepared by r.f. reactive magnetron sputtering with N2-Ar gases, have been studied. Transmission electron microscopy observation reveals that the nitrided films are composed of a very fine network of heterogeneous phases, The electrical resistivity of films increases with increasing nitrogen flow ratio in the sputtering gas (Ar-N2) and is attributed to the refinement of structure due to nitridation. The films containing Si or Al exhibit soft magnetic properties, characterized by a good frequency response of permeability. The existence of a larger amount of M further increases the resistivity, suggesting that the presence of the M-N phase plays an important role in high resistivity.

引用

页码：892 / 896

页数：5

共 12 条

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