NEW MEASUREMENTS OF THE ELASTIC PROPERTIES OF COMPOSITION MODULATED CU-NI THIN-FILMS

被引:23
作者
MOREAU, A [1 ]
KETTERSON, JB [1 ]
MATTSON, J [1 ]
机构
[1] ARGONNE NATL LAB,DIV MAT SCI,ARGONNE,IL 60439
关键词
D O I
10.1063/1.103034
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a new ultrasonic method which relies on the measurement of the in-phase and quadrature components of a continuous ultrasonic excitation as a function of position, we have measured the flexural modulus of composition modulated Cu-Ni self-supporting thin films. For some of the films, we have also observed the shear (Sz) modulus (allowing the calculation of the biaxial and Young's moduli). No enhancement of these moduli was observed for composition wavelengths in the range of 17-40 Å.
引用
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页码:1959 / 1961
页数:3
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