SURFACE INTERACTION STUDY OF TIC SINGLE-CRYSTAL WITH ENERGETIC HYDROGEN-IONS BY AES AND FDS

被引:12
作者
FUKUDA, S
MOHRI, M
YAMASHINA, T
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 01期
关键词
D O I
10.1116/1.572623
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:50 / 53
页数:4
相关论文
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