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THEORETICAL ASSESSMENTS OF MAJOR PHYSICAL PROCESSES INVOLVED IN THE DEPTH RESOLUTION IN SPUTTER PROFILING

被引：52
作者：
CARTER, G
GRASMARTI, A
NOBES, MJ
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 62卷 / 3-4期
关键词：
D O I：
10.1080/00337578208222785
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：119 / 152
页数：34
相关论文
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