DEVELOPMENT OF A MULTITASK AND MULTIINSTRUMENT SAMPLE TRANSFER SYSTEM

被引：11

作者：

THEVUTHASAN, S ^{[1
]}

BAER, DR ^{[1
]}

ENGLEHARD, MH ^{[1
]}

LIANG, Y ^{[1
]}

WORTHINGTON, JN ^{[1
]}

HOWARD, TR ^{[1
]}

MUNN, JR ^{[1
]}

ROUNDS, KS ^{[1
]}

机构：

[1] THERMION NW INC, PORT TOWNSEND, WA 98368 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 04期

关键词：

D O I：

10.1116/1.587832

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A multiinstrument, multitask UHV sample transfer system being developed for integration with a wide range of synthesis and analysis instruments is described. The specimen transfer capability allows a sample to be synthesized, processed, and characterized by several surface science techniques without exposing the sample to air. Although several types of transfer systems now exist, no existing system has the range of operation desired for a user facility which will be equipped with a wide range of vacuum and controlled atmosphere-based techniques. Three different kinds of sample platens, which can be used in ambient, high-temperature, and surface chemistry experiments, have been designed and tested. The temperature range of the specimen can be as high as 2000 K during heating and as low as 150 K during cooling. (C) 1995 American Vacuum Society

引用

页码：1900 / 1905

页数：6