PREGROOVED DISK FORMED BY DRY ETCHING TECHNIQUE

被引：1

作者：

MIYAGI, M

IWASAWA, A

YAMAZAKI, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1987年 / 26卷

关键词：

D O I：

10.7567/JJAPS.26S4.83

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：83 / 86

页数：4

共 5 条

[1]

BRICOT C, 1982, P SOC PHOTO-OPT INST, V329, P94, DOI 10.1117/12.933380

[2] 10-BILLION BITS ON A DISK [J].

BULTHUIS, K ;

CARASSO, MG ;

HEEMSKERK, JPJ ;

KIVITS, PJ ;

KLEUTERS, WJ ;

ZALM, P .

[3] CONTROL OF RELATIVE ETCH RATES OF SIO2 AND SI IN PLASMA ETCHING [J].

HEINECKE, RAH .

[4]

IRVING SM, 1971, SOLID STATE TECHNOL, V6, P47

[5] PLASMA ETCHING IN INTEGRATED-CIRCUIT MANUFACTURE - REVIEW [J].

POULSEN, RG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01) :266-274