INFRARED SPECTROSCOPIC STUDY OF CR AND CU METALLIZATION OF POLYIMIDE

被引：42

作者：

DUNN, DS

GRANT, JL

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.576128

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：253 / 255

页数：3

共 15 条

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[8] COMPLEX-FORMATION AND GROWTH AT THE CR-POLYIMIDE AND CU-POLYIMIDE INTERFACE
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[9] SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS
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