A spiral coil type thin film microtransformer with the size of 2.4 x 3.1 mm2 was fabricated using photolithography techniques for application in mega-hertz region switching regulators. An amorphous magnetic film of a multilayered CoNbZr/SiO2 was used as magnetic core. Load characteristics were measured at 10 MHz. A comparatively high efficiency of 67% and an acceptable excitation current of 25 mA were obtained in spite of the small size of the microtransformer.