VAPOR SPECIES FROM FUSED LI2O-B2O3, NA2O-SIO2 AND NA2O-P2O5 SYSTEMS FOR THIN-FILM MANUFACTURING BY PVD

被引：7

作者：

ZHANG, LW

YAHAGI, M

GOTO, KS

机构：

来源：

SOLID STATE IONICS | 1986年 / 18-9卷

关键词：

D O I：

10.1016/0167-2738(86)90326-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1163 / 1169

页数：7

共 9 条

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