EFFECT OF SMALL-CLUSTER MOBILITY AND DISSOCIATION ON THE ISLAND DENSITY IN EPITAXIAL-GROWTH

被引:51
作者
LIU, SD
BONIG, L
METIU, H
机构
[1] UNIV CALIF SANTA BARBARA, DEPT CHEM, SANTA BARBARA, CA 93106 USA
[2] UNIV CALIF SANTA BARBARA, CTR QUANTIZED ELECTR STRUCT, SANTA BARBARA, CA 93106 USA
关键词
D O I
10.1103/PhysRevB.52.2907
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We suggest that for many systems the epitaxial growth conditions are such that the mobility of small clusters, such as dimers, substantially affects the density of the islands formed by nucleation, while the dissociation of the clusters is less important. We study the effect of small-cluster mobility on the island density formed under epitaxial growth conditions with both rate equations and computer simulations. We find that the scaling derived by Villain, Pimpinelli, Tang, and Wolf from simple rate equations is in agreement with the simulations, if great care is taken to make sure that the system has reached the scaling regime. As an application we suggest a more plausible analysis of some important recent experiments. The scaling equations can be used to extract the activation barriers for monomer and small-cluster diffusion from data on island-density dependence on temperature and deposition rate.
引用
收藏
页码:2907 / 2913
页数:7
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