STRUCTURAL CHARACTERIZATION OF MULTILAYER METAL PHOSPHONATE FILM ON SILICON USING ANGULAR-DEPENDENT X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：59

作者：

AKHTER, S ^{[1
]}

LEE, H ^{[1
]}

HONG, HG ^{[1
]}

MALLOUK, TE ^{[1
]}

WHITE, JM ^{[1
]}

机构：

[1] UNIV TEXAS,CTR MAT CHEM,AUSTIN,TX 78712

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576058

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1608 / 1613

页数：6

共 12 条

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