MEASUREMENT OF THE IONIZATION AND ATTACHMENT COEFFICIENTS IN SF6 AND HELIUM MIXTURES

被引：23

作者：

SHIMOZUMA, M

TAGASHIRA, H

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1983年 / 16卷 / 07期

关键词：

D O I：

10.1088/0022-3727/16/7/018

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1283 / 1291

页数：9

共 20 条

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